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Updated: Sep 11, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Portable low-coherence digital holographic microscope
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We present a compact and portable setup for digital holographic microscopy that works in a slightly off-axis configuration. It has a monolithic structure and a minimal number of elements, a feature that makes it insensitive to vibrations. The design uses an LED as an illuminating source and a single cube beam splitter interferometer to avoid parasitic interferences and coherent noise reduction. We get imaging phase reconstruction in one shot, which is valuable for dynamical inspection and portability due to its high stability and compactness. We present experimental results of the system tested in a harsh environment.
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