Robust peak localization of the modulation response curve in continuously scanning structured illumination microscopy...

Area of Science:

• Metrology
• Optical Microscopy
• Surface Metrology

Background:

• Continuous vertical scanning structured illumination microscopy (CVS-SIM) is used for 3D surface measurements.
• Noise in acquisition signals and imaging degrades modulation response (MR) calculations.
• Existing peak localization methods fail in high-noise environments, reducing accuracy.

Purpose of the Study:

• To develop a robust peak localization method for MR in CVS-SIM.
• To improve the accuracy and reliability of 3D surface topography reconstruction.
• To enhance reconstruction speed by minimizing redundant calculations.

Main Methods:

• Formulated a probability density equation for peak position using multi-dimensional gradient information.
• Adaptively selected the effective MR range based on noise levels and probability density distribution.
• Analyzed gradient change contributions to maximum modulation position to mitigate noise.

Main Results:

• The proposed method demonstrates robustness against noise interference in MR.
• Adaptive range selection minimizes redundant calculations and improves reconstruction speed.
• Simulation and experimental validation confirm the method's feasibility for high-precision measurements.

Conclusions:

• The novel probability density-based peak localization method significantly enhances CVS-SIM accuracy.
• The adaptive approach effectively handles varying noise levels, improving 3D measurement reliability.
• This technique shows potential for precise measurement of complex surfaces.