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Ultra-high precision NiP mirror fabrication using ion beam figuring for space applications
Optics Express
|August 13, 2025
Summary
Ion beam figuring (IBF) effectively corrects surface errors in nickel phosphorous (NiP) mirrors used in space optics. This noncontact method significantly improves mirror surface quality, achieving sub-5 nm irregularities for critical applications.
Area of Science:
- Optical Engineering
- Materials Science
- Space Instrumentation
Background:
- Nickel phosphorous (NiP) is a key optical material for space-based visible to mid-infrared instruments.
- Electroless NiP deposition followed by single-point diamond turning (SPDT) is a common fabrication process.
- SPDT introduces low- and mid-spatial frequency errors, degrading optical performance.
Purpose of the Study:
- To demonstrate the efficacy of ion beam figuring (IBF) in correcting surface errors on NiP-coated mirrors.
- To quantify the improvement in surface quality achieved by IBF for both flat and spherical NiP mirrors.
Main Methods:
- Application of ion beam figuring (IBF), a noncontact, deterministic surface correction technique.
- IBF was applied as a final fabrication step to NiP-coated flat and spherical mirrors.
- One flat mirror underwent additional chemical and mechanical polishing before IBF.
Main Results:
- IBF reduced root mean square (RMS) height error on a flat NiP mirror from 16.3 nm to 3.4 nm over a 25x15 mm² clear aperture.
- IBF decreased surface irregularity on a spherical NiP mirror from 13.8 nm to 4.4 nm RMS.
- Diamond turning marks remained as a limitation, but a polished and IBF-treated mirror achieved 1.9 nm RMS irregularity.
Conclusions:
- Ion beam figuring is a viable and effective method for correcting low-spatial frequency errors in NiP mirrors.
- IBF significantly enhances the surface quality of NiP optics for demanding space applications.
- Combining polishing with IBF offers a pathway to achieve even higher surface precision.

