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Accurately extracting silicon waveguide dimensions from a single high-order Mach-Zehnder Interferometer.

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    |August 13, 2025
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    Summary

    This study presents a new method to extract dimensions from silicon-on-insulator (SOI) strip waveguides using effective index (neff) and group index (ng). The technique utilizes a single high-order Mach-Zehnder Interferometer (MZI) for accurate waveguide characterization.

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    Area of Science:

    • Photonics
    • Materials Science
    • Optical Engineering

    Background:

    • Silicon-on-insulator (SOI) strip waveguides are crucial components in silicon photonics.
    • Accurate characterization of waveguide dimensions is essential for device performance.
    • Existing methods for dimension extraction can be complex or require multiple measurements.

    Purpose of the Study:

    • To introduce a novel methodology for extracting geometric dimensions of SOI strip waveguides.
    • To determine the effective index (neff) and group index (ng) using spectral data from a single high-order Mach-Zehnder Interferometer (MZI).
    • To develop an innovative mapping model relating waveguide geometry to neff and ng, enhancing accuracy and simplifying the process.

    Main Methods:

    • Experimental demonstration of a new dimension extraction methodology.
    • Utilizing spectral data from a single high-order MZI for neff and ng determination.
    • Developing and applying an innovative mapping model for waveguide dimension-neff/ng correlation.

    Main Results:

    • Successful extraction of dimensions from SOI strip waveguides manufactured on IMEC's iSiPP50G platform.
    • Demonstration of an innovative mapping model that accurately relates waveguide geometry to neff and ng.
    • Elucidation of the feasibility and constraints of using a single high-order MZI for optical transmission measurements.

    Conclusions:

    • The proposed methodology offers an accurate and simplified approach to SOI waveguide dimension extraction.
    • The innovative mapping model enhances the correlation between geometric parameters and optical indices.
    • The study highlights the impact of parameter extraction errors, providing valuable insights for future research.