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Related Concept Videos

Photoreceptors and Visual Pathways01:22

Photoreceptors and Visual Pathways

At the molecular level, visual signals trigger transformations in photopigment molecules, resulting in changes in the photoreceptor cell's membrane potential. The photon's energy level is denoted by its wavelength, with each specific wavelength of visible light associated with a distinct color. The spectral range of visible light, classified as electromagnetic radiation, spans from 380 to 720 nm. Electromagnetic radiation wavelengths exceeding 720 nm fall under the infrared category, whereas...

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Related Experiment Video

Updated: Jul 1, 2026

Selective Area Modification of Silicon Surface Wettability by Pulsed UV Laser Irradiation in Liquid Environment
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Light-induced optical and nanostructural changes of Si gratings.

Ester Abram, Paul Planken

    Optics Express
    |August 13, 2025
    PubMed
    Summary

    Silicon gratings used in nanolithography experience lower laser damage thresholds than flat silicon due to field enhancements. Grating deformation, not just optical changes, signals potential catastrophic damage.

    Area of Science:

    • Materials Science
    • Optics
    • Semiconductor Manufacturing

    Background:

    • Optical diffraction from gratings is crucial for wafer alignment in nanolithography.
    • Smaller gratings require higher laser fluences, increasing optical damage risk.
    • Understanding laser-induced damage in silicon gratings is vital for semiconductor fabrication.

    Purpose of the Study:

    • To investigate light-induced optical and structural changes in silicon gratings under femtosecond laser pulses.
    • To determine fluence thresholds for damage mechanisms in gratings versus flat silicon.
    • To correlate laser damage thresholds with local absorbed power density and understand deformation effects.

    Main Methods:

    • Exposure of flat silicon and silicon gratings to single femtosecond laser pulses.

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  • Measurement of optical and structural changes, including crater formation and grating deformation.
  • Near-field Rigorous Coupled-Wave Analysis (RCWA) to calculate absorbed power density profiles.

    • Main Results:

    • Fluence thresholds for damage mechanisms were 10-50% lower in gratings than in flat silicon.
    • Local field enhancements in gratings significantly reduce damage thresholds.
    • Grating line deformation, including inversion, was observed and correlated with damage onset.

    Conclusions:

    • Grating topography lowers laser damage thresholds in silicon, necessitating careful fluence control.
    • Grating line deformation serves as an early indicator of impending catastrophic laser-induced damage.
    • Findings provide insights for mitigating laser damage in silicon gratings for semiconductor manufacturing.