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A Strain-Compensated InGaAs/InGaSb Type-II Superlattice Grown on InAs Substrates for Long-Wavelength Infrared
Hao Zhou1, Chang Liu1, Yiqiao Chen2,3,4
1Key Laboratory of Artificial Micro- and Nano-Structures of Ministry of Education, School of Physics and Technology, Wuhan University, Wuhan 430072, China.
Abstract:
In this paper, the first demonstration of a highly strained In0.8Ga0.2As/In0.2Ga0.8Sb type-II superlattice structure grown on InAs substrates by molecular beam epitaxy (MBE) for long-wavelength infrared detection was reported. Novel methodologies were developed to optimize the As and Sb flux growth conditions. The quality of the epitaxial layer was characterized using multiple analytical techniques, including differential interference contrast microscopy, atomic force microscopy, high-resolution X-ray diffraction, and high-resolution transmission electron microscopy. The high-quality superlattice structure, with a total thickness of 1.5 μm, exhibited exceptional surface morphology with a root-mean-square roughness of 0.141 nm over a 5 × 5 μm2 area. Single-element devices with PIN architecture were fabricated and characterized. At 77 K, these devices demonstrated a 50% cutoff wavelength of approximately 12.1 μm. The long-wavelength infrared PIN devices exhibited promising performance metrics, including a dark current density of 7.96 × 10-2 A/cm2 at -50 mV bias and a high peak responsivity of 4.90 A/W under zero bias conditions, both measured at 77 K. Furthermore, the devices achieved a high peak quantum efficiency of 65% and a specific detectivity (D*) of 2.74 × 1010 cm·Hz1/2/W at the peak responsivity wavelength of 10.7 µm. These results demonstrate the viability of this material system for long-wavelength infrared detection applications.
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