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Broad Dynamic Range with High Temperature Stability in Ultrathin CrPS4 Nano-Electromechanical Resonators
Jia-Wei Fang1, Jun-Fan Chen1, Meng-Lin Guo1
1Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu, 610054, China.
Small (Weinheim an Der Bergstrasse, Germany)
|August 14, 2025
Summary
Ultra-thin Chromium thiophosphate (CrPS4) nano-electro-mechanical systems (NEMS) resonators demonstrate a large dynamic range and stability across wide temperature variations. These findings pave the way for advanced sensing applications under extreme conditions.
Area of Science:
- Materials Science
- Nanotechnology
- Mechanical Engineering
Background:
- Atomically thin materials offer exceptional mechanical and optical properties for nano-electro-mechanical systems (NEMS) resonators.
- Sensing applications requiring high resolution and broad dynamic range (DR) are challenged by parameter variations, especially temperature.
- Maintaining a stable, large dynamic range across different temperatures is a significant hurdle for NEMS resonators.
Purpose of the Study:
- To investigate the dynamic range and temperature stability of ultra-thin Chromium thiophosphate (CrPS4) NEMS resonators.
- To characterize the thermomechanical vibrations and Duffing responses of CrPS4 resonators.
- To assess the potential of these resonators for ultrasensitive sensing under extreme conditions.
Main Methods:
- Fabrication of ultra-thin CrPS4 mechanical resonators operating at frequencies up to 84 MHz.
- Characterization of intrinsic Brownian thermomechanical vibrations and noise levels.
- Analysis of Duffing responses to determine dynamic range and temperature stability.
Main Results:
- CrPS4 resonators exhibit a maximal dynamic range of 106 dB at liquid helium temperature.
- The expansive dynamic range is maintained over a 100 K temperature range.
- Noise levels as low as 9.98 fm/Hz^-1/2 were recorded, with an estimated mass resolution of 1.51 × 10^-24 g.
Conclusions:
- Ultra-thin CrPS4 NEMS resonators possess remarkable dynamic range and stability over broad temperature ranges.
- These properties make them suitable for high-resolution sensing applications, even under extreme conditions.
- The findings suggest potential for new NEMS applications in ultrasensitive sensing and signal processing.

