Compact X-ray autocollimator using dynamical Laue diffraction

We introduce an X-ray autocollimator using Laue diffraction in thick silicon crystals for ultra-precision angle measurement. The approach leverages angular amplification coupled with anomalous absorption effects in thick crystals on the basis of the dynamical theory of X-ray diffraction. An experiment with a thick silicon crystal of 5 mm shows a sensitivity of 142 μm/µrad for the (220) reflecting atomic planes, outperforming the traditional autocollimator by two orders of magnitude with compactness. This development, in combination with traditional autocollimators, facilitates high-sensitivity, broad-angle measurements and opens up new opportunities for precision metrology in advanced fourth-generation synchrotron radiation facilities.