Related Experiment Video
Updated: Sep 10, 2025

04:57
Residue-Free Fabrication of van der Waals Heterostructures of Two-Dimensional Materials
Published on: July 18, 2025
269
van der Waals devices for surface-sensitive experiments
Nicolai Taufertshöfer1,2, Corinna Burri1,3, Rok Venturini1
1PSI Center for Photon Science, Paul Scherrer Institute, 5232 Villigen PSI, Switzerland. simon.gerber@psi.ch.
Nanoscale
|August 19, 2025
Summary
We developed a new stencil lithography method to create pristine van der Waals devices for advanced characterization. This technique enables reliable electrical contacts and clean surfaces for surface-sensitive probes.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Nanotechnology
Background:
- Surface-sensitive characterization of van der Waals (vdW) devices is crucial for understanding phase transitions and electronic states.
- Integrating vdW materials into devices while preserving surface integrity for combined experiments remains a significant challenge.
- Conventional lithography methods often introduce surface contamination, hindering advanced spectroscopic analysis.
Purpose of the Study:
- To present a novel stencil lithography technique for fabricating vdW devices with pristine surfaces.
- To enable combined electrical transport and surface-sensitive measurements on vdW materials.
- To overcome limitations of conventional lithography in vdW device fabrication.
Main Methods:
- Resist-free stencil lithography using a shadow mask for patterning electrical contacts.
- Ultra-high vacuum (UHV) fabrication environment.
- Gold-assisted exfoliation for obtaining thin vdW flakes down to the single-layer regime.
- Fabrication of 1T-TaS2 devices for demonstration.
Main Results:
- Successful fabrication of micron-scale electrical contacts on vdW flakes.
- Demonstrated exfoliation of thin flakes down to the single-layer limit.
- Achieved reliable contacts for electrical pulsing and resistance measurements on 1T-TaS2 devices.
- Maintained clean surfaces suitable for angle-resolved photoemission spectroscopy (ARPES).
Conclusions:
- The stencil lithography approach provides a viable platform for fabricating vdW devices with high-quality surfaces.
- This method facilitates in-operando studies of vdW systems using surface-sensitive techniques.
- Enables detailed investigation of electronic properties and phase transitions in vdW materials within functional device architectures.
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