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Optimization of sputtered iridium oxide microelectrodes for long-term intracortical stimulation
Maarten Schelles1,2, Laurens Goyvaerts1,2, Lara Merken3,4
1Micro- and Nanosystems (MNS), Department of Electrical Engineering (ESAT), KU Leuven, Leuven, 3000, Belgium.
Biomedical Physics & Engineering Express
|August 21, 2025
Summary
Sputtered iridium oxide films (SIROFs) demonstrate optimal fabrication for neural prostheses. These electrodes offer excellent stimulation properties and long-term stability for safe, efficient intracortical stimulation.
Area of Science:
- Biomaterials Engineering
- Neuroscience
- Materials Science
Background:
- Clinical neural prostheses require electrodes with excellent stimulation properties and long-term stability.
- Iridium oxide is a promising material, but its performance depends heavily on fabrication parameters.
Purpose of the Study:
- To investigate the fabrication of sputtered iridium oxide films (SIROFs).
- To optimize SIROF fabrication for enhanced electrochemical properties and stability for intracortical stimulation.
Main Methods:
- Fabrication of SIROFs with varying oxygen flow, sputtering power, and sputtering time.
- Electrochemical characterization using electrochemical impedance spectroscopy (EIS) and cyclic voltammetry (CV).
- Pulsing experiments and in vivo stability testing in non-human primates.
Main Results:
- Optimal SIROF fabrication achieved at 5% oxygen flow, 80 W, and 7 minutes, yielding a 660 nm film.
- Electrodes exhibited low impedance (4.8 kΩ at 1 kHz) and high charge injection capacity (2.3 mC/cm²).
- Stable performance demonstrated over 276 million pulses and three months in vivo.
Conclusions:
- Optimized SIROFs possess superior surface structure and electrochemical properties.
- The material demonstrates exceptional robustness and long-term stability for chronic clinical applications.
- SIROFs are a viable material for efficient and safe intracortical stimulation in neural prostheses.

