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Clean Sampling and Analysis of River and Estuarine Waters for Trace Metal Studies

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Practical Guidance on Selecting Analytical Methods for PFAS in Semiconductor Manufacturing Wastewater.

Boris Droz¹, Christopher G Heron², Mitchell L Kim-Fu³

¹Department of Biological and Ecological Engineering, Oregon State University, Corvallis, Oregon 97331, United States.

ACS Measurement Science Au

|August 27, 2025

Summary

This summary is machine-generated.

This review guides selecting analytical methods for per- and polyfluoroalkyl substances (PFAS) in semiconductor wastewater. It links PFAS structure, properties, and suitable methods for accurate detection and monitoring.

Keywords:

gas chromatography mass spectrometry (GC–MS)high-resolution mass spectrometry (HRMS)nuclear magnetic resonance (NMR)per and polyfluoroalkyl substances (PFAS)semiconductor total organic fluorine ultrashort-chain PFAS wastewater

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Area of Science:

Environmental Chemistry
Analytical Chemistry

Background:

Per- and polyfluoroalkyl substances (PFAS) are prevalent contaminants in industrial wastewater.
Understanding PFAS structure-property relationships is crucial for effective analysis.

Purpose of the Study:

To provide an overview of PFAS nomenclature, structure, and properties relevant to analytical method selection.
To guide the choice of analytical methods for PFAS in treated semiconductor wastewater.

Main Methods:

Review of fundamental concepts linking PFAS structure to physical-chemical properties.
Comparison of standardized analytical methods (EPA, ASTM) for target and ultrashort PFAS.
Evaluation of methods for volatile, nonvolatile, suspect, and nontarget PFAS.
Assessment of nonspecific methods (total fluorine, precursor assays) and advanced detection techniques.

Main Results:

PFAS properties significantly influence the suitability of analytical methods.
Guidance tables are provided for method selection based on specific PFAS structures found in semiconductor wastewater.
Current methods for sample handling, target PFAS, and total fluorine are compared.

Conclusions:

Effective analysis of PFAS in semiconductor wastewater requires careful consideration of PFAS structure and properties.
A comprehensive approach encompassing various analytical methods is necessary for accurate PFAS assessment.
The review offers practical guidance for method selection and highlights emerging monitoring technologies.