Practical Guidance on Selecting Analytical Methods for PFAS in Semiconductor Manufacturing Wastewater

Boris Droz1, Christopher G Heron2, Mitchell L Kim-Fu3

  • 1Department of Biological and Ecological Engineering, Oregon State University, Corvallis, Oregon 97331, United States.

PubMed
Summary

This review guides selecting analytical methods for per- and polyfluoroalkyl substances (PFAS) in semiconductor wastewater. It links PFAS structure, properties, and suitable methods for accurate detection and monitoring.