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Related Concept Videos

Magnetic Flux01:18

Magnetic Flux

The magnetic flux measures the number of magnetic field lines passing through a given surface area. The SI unit for magnetic flux is the weber (Wb). Magnetic flux is a scalar quantity. It depends on three factors: the strength of the magnetic field B, the area through which the field lines pass, and the relative orientation of the field with the surface area.
Suppose a surface is divided into elements of area dA. For each element, the component of the magnetic field that is normal to the...

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Micro Orthogonal Fluxgate Sensor Fabricated with Amorphous CoZrNb Film.

Kyung-Won Kim1,2, Sung-Min Hong2, Daesung Lee2

  • 1Department of Material Science and Engineering, Korea University, Seoul 02841, Republic of Korea.

Sensors (Basel, Switzerland)
|August 28, 2025
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Summary

Researchers developed tiny orthogonal fluxgate sensors using CoZrNb films. These micro sensors effectively measure the Earth

Keywords:
amorphous CoZrNb filmmicro-fabricationorthogonal fluxgatesensitivity

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Sensor Technology

Background:

  • Orthogonal fluxgate sensors are crucial for magnetic field measurement.
  • Miniaturization of sensors is essential for advanced applications.
  • Amorphous magnetic films offer unique properties for sensor fabrication.

Purpose of the Study:

  • To fabricate micro orthogonal fluxgate sensors using amorphous CoZrNb films.
  • To optimize fabrication processes and sensor performance.
  • To investigate the sensor's characteristics for Earth's magnetic field measurement.

Main Methods:

  • Fabrication of micro sensors (1.5 mm × 0.5 mm) using amorphous CoZrNb films.
  • Optimization of sputtering and deposition parameters (sputtering angle, substrate rotation).
  • Application of Ta adhesion layer and O2 plasma surface treatment.
  • Vacuum annealing at 300 °C with a 500 Oe magnetic field.
  • Quantitative investigation of operation frequency and conductor width effects.

Main Results:

  • Successfully fabricated micro orthogonal fluxgate sensors.
  • Overcame challenges like poor step coverage and delamination.
  • Achieved optimal performance through vacuum annealing, enhancing magnetic softness and anisotropy.
  • Obtained very low coercivity (0.1 Oe) and a stable amorphous structure.
  • Maximum sensitivity of 0.98 mV/Oe (9.8 V/T) was recorded.

Conclusions:

  • Miniaturized orthogonal fluxgate sensors can be fabricated using amorphous CoZrNb films.
  • The developed sensors are suitable for multi-chip packaging.
  • These sensors demonstrate potential for measuring the Earth's magnetic field.