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Scatterometry-Based Monitoring of Laser-Induced Periodic Surface Structures on Stainless Steel.

Agustín Götte1, Marcelo Sallese1, Fabian Ränke1

  • 1Institut für Fertigungstechnik, Technische Universität Dresden, George-Bähr-Str. 3c, 01069 Dresden, Germany.

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Summary

Scatterometry effectively monitors Laser-Induced Periodic Surface Structures (LIPSS) on stainless steel, enabling real-time quality control. This optical method accurately estimates LIPSS height and period, crucial for process stability.

Keywords:
in-line process monitoringlaser-induced periodic surface structures (LIPSS)scatterometryultrashort pulsed laser processing

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Area of Science:

  • Materials Science
  • Optical Engineering
  • Surface Science

Background:

  • Laser-based surface structuring is vital for manufacturing high-quality components.
  • Optical scatterometry offers a fast, non-contact, and non-destructive monitoring solution for microscale features.
  • Laser-Induced Periodic Surface Structures (LIPSS) are critical for tailoring material properties.

Purpose of the Study:

  • To investigate the efficacy of scatterometry for monitoring LIPSS formation and characteristics.
  • To correlate scatterometry data with microscopy-based measurements of LIPSS.
  • To assess the potential of scatterometry for real-time process control in LIPSS fabrication.

Main Methods:

  • Fabrication of LIPSS on stainless steel using ultrashort laser pulses and a polygon scanning system.
  • Characterization of LIPSS using microscopy and a scatterometry-based optical setup.
  • Analysis of diffraction patterns and intensity distributions to determine LIPSS height, spatial period, and regularity.

Main Results:

  • Scatterometry accurately estimated LIPSS height up to 420 nm with an average error of 7.7% for the highest structures.
  • Period estimation showed an average error of approximately 5% for well-defined LIPSS.
  • Monitoring of LIPSS opening angle correlated with regularity, identifying conditions where sub-structures dominate over LIPSS.

Conclusions:

  • Scatterometry is a viable technique for in-situ monitoring and characterization of LIPSS.
  • The method allows for the study of LIPSS formation dynamics by analyzing evolving diffraction patterns.
  • This approach enhances process stability and reproducibility in laser-based surface structuring.