Thermal Control Systems in Projection Lithography Tools: A Comprehensive Review

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Updated: May 5, 2026

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
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Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

Published on: October 11, 2016

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Di Cao1, He Dong2, Zhibo Zeng1

  • 1State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.

Micromachines
|August 28, 2025
PubMed

Keywords:
projection lithography toolsthermal control algorithmsthermal control structuresthermal control systemsthermal deformation

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