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Large-Area Monolayer p-Type Semiconductor Films Toward High-Performance Electrical Device Arrays
Lingxiao Yu1, Junyang Tan2, Hanyuan Ma1
1State Key Laboratory of New Ceramic Materials, School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China.
Advanced Materials (Deerfield Beach, Fla.)
|August 29, 2025
Summary
Large-area, high-quality 2D p-type semiconductors are now achievable. Controlled nucleation enables centimeter-scale monolayer tungsten diselenide (WSe2) films for advanced electronic devices.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Nanotechnology
Background:
- Two-dimensional (2D) semiconductors offer solutions for post-Moore computing due to their atomic thickness and immunity to short-channel effects.
- A significant challenge remains in producing large-area, high-quality monolayer p-type 2D semiconductors.
Purpose of the Study:
- To develop a method for controlled nucleation to synthesize large-area, uniform monolayer p-type 2D semiconductors.
- To investigate the electrical properties of synthesized tungsten diselenide (WSe2) and Nb-incorporated WSe2 films.
Main Methods:
- Controlled nucleation of p-type WSe2 by tuning selenium precursor evaporation areas.
- Optimization of nucleation density for centimeter-scale film synthesis.
- Fabrication and characterization of field-effect transistor arrays.
Main Results:
- Centimeter-scale uniform monolayer WSe2 and Nb-incorporated WSe2 films were successfully synthesized.
- WSe2 films exhibited p-type behavior with hole mobilities of 34 ± 17 cm²/V·s and an on/off ratio of 4 × 10⁷.
- Nb incorporation enhanced hole mobility to 48 ± 16 cm²/V·s with an on/off ratio of ≈10⁸.
Conclusions:
- The controlled nucleation strategy enables the scalable synthesis of uniform 2D p-type semiconductors.
- Synthesized WSe2 films demonstrate potential for use in electrical devices and integrated circuits.
- Nb incorporation further improves the performance of 2D p-type semiconductors for electronic applications.

