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Updated: Jun 13, 2026

Patterning via Optical Saturable Transitions - Fabrication and Characterization
Published on: December 11, 2014
Optically-driven organic nano-step actuator for reconfigurable photonic circuits
Ji-Zhe Zhang1,2,3, Xin-Biao Xu1,2,3, Yanjun Gong4
1Laboratory of Quantum Information, University of Science and Technology of China, Hefei, PR China.
Abstract:
The assembling and reconfiguration of the integrated devices are of great importance to extend the capability of photonic chips based on top-down fabrication approaches. Here, we demonstrate a fully-programmable organic micro-actuator for precise manipulation of on-chip microstructures. Controlled by a low-power laser, the micro-actuator achieves a 30 nm motion step size, and shows the capability to traverse various chip substrates, overcome obstacles, and push microspheres to target locations. The micro-actuator is applied to fine-tune the microcavity and shift the resonance by three linewidths without compromising its quality factor. This optically-driven micro-actuator offers a unique approach for post-fabrication assembly and reconfiguration of photonic circuits, paving the way for adaptive, multifunctional photonic systems.

