Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor

We measured the residual stress tensor in a nitrogen-doped chemical vapor deposition (001) diamond film. The stress tensor was evaluated from the amount of the shift in optically detected magnetic resonance (ODMR) spectra of NV center in the diamond. A confocal microscopy setup was used to observe the spatial variation of the stress tensor in the diamond film. We found that the components of the stress tensor, σ_xy, σ_yz, σ_zx and σ_xx+ σ_yy+ σ_zz, of the residual stress were approximately 0.077, -0.39, -0.67 and 1.52 GPa, respectively, in the x = [100], y = [010], z = [001] coordinate system. Regarding the components of the shear stress, σ_xy, σ_yz and σ_zx, the nitrogen-doped CVD diamond film grown in this study had mainly sheared stress in the z-direction, which was the growth direction of the CVD diamond film. In addition, regarding axial stress σ_xx+ σ_yy+ σ_zz, the CVD diamond film was subjected to compressive stress. Due to this compressive stress, the volume of the CVD diamond film decreased by approximately 0.073%. We considered that nitrogen doping contributed to the decrease in volume of the CVD diamond film.