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The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
Published on: May 24, 2020
Miao Cheng1,2,3, Yanqin Zhang1,2, Jinyao Wang1,2
1State Key Laboratory of Fabrication Technologies for Integrated Circuits, Chinese Academy of Sciences, Beijing, 100029, China.
This study demonstrates high-performance polymer monolayer transistors by controlling molecular orientation and using a top-gate design. These transistors exhibit record mobility, stability, and enable 3D integration for advanced electronics.
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