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Updated: Jan 17, 2026

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Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
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Fabrication of high-Q, millimeter-scale microbubble resonators
Optics Letters
|September 16, 2025
Summary
We developed a new method using a CO2 laser to create microbubble resonators (MBRs). This technique produces high-quality MBRs suitable for advanced sensing and microfluidic applications.
Area of Science:
- Optics and Photonics
- Materials Science
- Microfluidics
Background:
- Microbubble resonators (MBRs) are crucial optical devices for sensing.
- Previous fabrication methods often require specialized equipment and pre-tapered tubes.
Purpose of the Study:
- To present a novel, accessible method for fabricating symmetric microbubble resonators (MBRs).
- To demonstrate the high performance and integration capabilities of the fabricated MBRs.
Main Methods:
- Utilized a CO2 laser combined with an automated rotational system for uniform heating.
- Controlled internal pressure and laser power for precise MBR formation.
- Employed readily available off-the-shelf components for system construction.
Main Results:
- Successfully fabricated MBRs with diameters from micrometers to millimeters.
- Achieved smooth surfaces and high structural integrity in fabricated MBRs.
- Demonstrated high Q-factors exceeding 10^7, indicating excellent optical performance.
Conclusions:
- The novel CO2 laser-based method offers a reproducible and cost-effective approach to MBR fabrication.
- The high Q-factors and compatibility with microfluidic systems highlight the potential of these MBRs for advanced sensing applications.

