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Updated: Jan 17, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
1Research & Development Group, Hitachi, Ltd., Hatoyama 350-0395, Japan.
Electron holography now offers precise, atomic-scale 3D imaging of electromagnetic fields. Advances in aberration correction enable detailed analysis of electrostatic potentials and magnetic fields in materials.
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