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Encapsulation of Monolayer 2D Materials Using Kinetic Energy-Controlled Pulsed Laser Deposition.

Daniel T Yimam1, Sumner B Harris1, Austin C Houston2

  • 1Center for Nanophase Materials Sciences Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, United States.

ACS Applied Materials & Interfaces
|September 22, 2025
PubMed
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Researchers developed a method to protect sensitive monolayer (ML) two-dimensional (2D) materials during pulsed laser deposition (PLD). By reducing kinetic energy (KE) with background gas, they enabled damage-free encapsulation for advanced electronics.

Area of Science:

  • Materials Science
  • Nanotechnology
  • Surface Science

Background:

  • Monolayer (ML) two-dimensional (2D) materials are crucial for next-gen electronics but sensitive to environmental damage.
  • Energetic plasma deposition techniques like pulsed laser deposition (PLD) risk damaging ML 2D materials due to high kinetic energies (KEs).

Purpose of the Study:

  • To develop a general strategy to understand and mitigate damage during PLD on ML 2D materials.
  • To enable the use of PLD for encapsulating and growing thin films on sensitive ML 2D materials without causing damage.

Main Methods:

  • Reduced incident KE of ablated species below the threshold displacement energy (TDE) using background gas collisions.
  • Utilized ion flux diagnostics and in situ Raman spectroscopy of monolayer graphene during amorphous boron nitride (a-BN) PLD.
Keywords:
2D materialsamorphous boron nitrideencapsulationgraphenein situ diagnosticspulsed laser deposition

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  • Correlated damage with fast ions penetrating background gas, applying Beer's Law.

    • Main Results:

    • Damage during PLD is primarily caused by fast ions, often missed in imaging.
    • A "soft landing" approach with a ~2 nm a-BN layer, after eliminating fast ions, effectively protected monolayer graphene.
    • Deposited a-BN films exhibited a dielectric constant of 3.6 and tunable charge injection properties.

    Conclusions:

    • The developed strategy mitigates PLD-induced damage on ML 2D materials by controlling ion KE.
    • Pulsed laser deposition is now a viable technique for encapsulating and growing films on ML 2D materials.
    • This research has significant implications for integrating 2D materials into microelectronics, optoelectronics, and sensors.