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Mid-spatial frequency error characteristics induced by tool influence function in bonnet polishing.

Lirong Peng, Yiren Wang, Longxiang Li

|September 22, 2025

Summary

This summary is machine-generated.

Bonnet polishing can be improved by understanding tool removal functions. Larger curvature bonnets and lower air pressure reduce mid-spatial frequency (MSF) errors for better machining accuracy.

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Area of Science:

Materials Science
Mechanical Engineering
Optical Engineering

Background:

Bonnet polishing is a key technique for precision machining of complex surfaces.
Mid-spatial frequency (MSF) errors limit polishing accuracy and efficiency.

Purpose of the Study:

Investigate how tool removal function characteristics impact MSF errors in bonnet polishing.
Develop a model to predict MSF error residuals.

Main Methods:

Finite element simulations to derive theoretical removal functions based on Preston's law, Hertzian contact mechanics, and kinematic analysis.
Spectral-domain simulation model to quantify MSF error residuals.
Experimental validation on a 100 mm fused silica element.

Main Results:

Larger curvature bonnets and lower air pressure were found to decrease MSF error residuals.
The MSF prediction model showed good agreement with experimental results.

Conclusions:

Tool removal function characteristics significantly influence MSF errors in bonnet polishing.
Findings offer guidance for minimizing MSF errors in high-precision applications.