Single-channel white light interference vibration-resistant measurement method based on non-uniform fast Fourier...

Area of Science:

• Metrology
• Optical Engineering
• Surface Science

Background:

• White light interference (WLI) is crucial for non-destructive, high-precision 3D surface reconstruction of micro-nano structures.
• WLI methods are inherently sensitive to environmental vibrations, compromising measurement accuracy.
• Existing anti-vibration techniques face limitations in complex measurement scenarios.

Purpose of the Study:

• To develop a robust, single-channel white light interference anti-vibration measurement method.
• To enhance the accuracy and reliability of 3D surface reconstruction in vibrating environments.
• To overcome the limitations of traditional WLI methods under environmental disturbances.

Main Methods:

• A novel single-channel white light interference anti-vibration measurement method utilizing non-uniform fast Fourier transform (NUFFT).
• Convolution smoothing applied to interference signals to mitigate vibration-induced noise.
• High-precision signal sampling and reconstruction, followed by centroid method integration for 3D surface restoration.

Main Results:

• The proposed NUFFT method demonstrates superior vibration resistance compared to conventional frequency-domain filtering techniques.
• Effective recovery of 3D surface information even in significantly vibrating environments.
• Consistent performance across various measurement scenarios, validating the method's versatility.

Conclusions:

• The single-channel NUFFT method offers a significant advancement in anti-vibration measurement for WLI.
• This technique provides a reliable solution for accurate 3D surface reconstruction in challenging, vibration-prone conditions.
• The method holds promise for applications requiring high-precision metrology in industrial and research settings.