Design and Fabrication of Air-Coupled CMUT for Non-Contact Temperature Measurement Applications

Compared with traditional piezoelectric transducers, Capacitive Micromachined Ultrasonic Transducers (CMUTs) have advantages such as better impedance matching with air, smaller size, lighter weight, higher sensitivity, and ease of array formation. Acoustic temperature measurement is a technology that utilizes the relationship between sound velocity and temperature to achieve non-contact temperature detection, with advantages such as fast response and non-invasiveness. CMUT-based acoustic temperature field measurement can achieve temperature detection in situations with narrow spaces, portability, and high measurement accuracy. This paper investigates an air-coupled CMUT device for acoustic temperature measurement, featuring a resonant frequency of 220 kHz, and composed of 16 × 8 cells. The design and fabrication of the CMUT array were completed, and the device characteristics were tested and characterized. A temperature field measurement method using mechanical scanning was proposed. A temperature measurement experimental system based on CMUT devices was constructed, achieving preliminary measurement of acoustic transmission time in both uniform and non-uniform temperature fields. Using a temperature field reconstruction algorithm, the measurement and imaging of the temperature field above an electric heating wire were accomplished and compared with the thermocouple-based temperature measurement experiment. The experimental results verified the feasibility of CMUT devices for non-contact temperature field measurement.