On the Mode Localization Between Two Unidentical Resonators with Different Bending Modes for Acceleration Sensing

In the research, a novel accelerometer concept leveraging the mode-localization phenomenon is put forward. The sensor measures external acceleration through monitoring changes in the relative amplitude ratio among coupled resonators. The sensing part of the presented accelerometer comprises a doubly clamped beam coupled with a cantilever beam. Its design ensures the initial bending mode of the clamped beam approximates the secondary bending mode of the cantilever. Drawing on Euler-Bernoulli beam theory, the governing formulas of the coupled resonators are deduced and analyzed via Galerkin discretization integrated with the multiple-scale method. During working in both linear as well as nonlinear operating regions, this sensor's dynamic behavior can be tuned by adjusting the drive voltage. The obtained results demonstrate that the nonlinear dynamics increases the accelerometer sensitivity, which can be further enhanced by adjusting the coupling voltage without severe mode overlap. The presented model offers one viable method to enhance the overall performance in multi-mode MEMS accelerometers.