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Updated: Jan 16, 2026

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
1Shenzhen International Graduate School, Tsinghua University, Shenzhen 518071, China.
Interference lithography (IL) fabricates nanoscale patterns for advanced sensors. This review details optical control methods to enhance sensor sensitivity, resolution, and reliability.
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