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Updated: Jan 16, 2026

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
Published on: February 27, 2013
Temporal Sculpting of Laser Pulses for Functional Engineering of Al2O3/AgO Films: From Structural Control to Enhanced
Doaa Yaseen Doohee1, Abbas Azarian1, Mohammad Reza Mozaffari1
1Department of Physics, University of Qom, Qom 3716146611, Iran.
Abstract:
This study examines the effects of laser pulse duration on the structural, morphological, optical, and gas-sensing characteristics of Al2O3/AgO thin films deposited on glass substrates using pulsed laser deposition (PLD). Pulse durations of 10, 8, and 6 nanoseconds were achieved through optical lens modifications to control both energy density and laser spot size. X-ray diffraction (XRD) and atomic force microscopy (AFM) analyses showed a distinct reduction in both crystallite and grain sizes with decreasing pulse width, along with significant improvements in surface morphology refinement and film compactness. Hall effect measurements revealed a transition from n-type to p-type conductivity with decreasing pulse width, demonstrating increased hole concentration and reduced carrier mobility attributed to grain boundary scattering. Furthermore, current-voltage (I-V) characteristics demonstrated improved photoconductivity under illumination, with the most pronounced enhancement observed in samples prepared using longer pulse durations. Gas sensing measurements for NO2 and H2S revealed enhanced sensitivity, improved response/recovery characteristics at 250 °C, with optimal performance achieved in films deposited using shorter pulse durations. This improvement is attributed to their larger surface area and higher density of active adsorption sites. Our results demonstrate a clear relationship between laser pulse parameters and the functional properties of Al2O3/AgO films, providing valuable insights for optimizing deposition processes to develop advanced gas sensors.

