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Updated: Jan 16, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Visible-spectrum-spanning integrated optical-phased-array-based systems
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In this Letter, we design and experimentally demonstrate the first, to the best of our knowledge, integrated optical-phased-array-based (OPA-based) system that simultaneously emits and controls beams of red, green, and blue light. First, we develop this visible-spectrum-spanning integrated OPA-based system architecture and the corresponding requisite devices and fabricate the system in a 300-mm wafer-scale silicon-photonics foundry process. Next, we use the integrated OPA-based system to experimentally demonstrate simultaneous 2D beam steering at red, green, and blue wavelengths. Finally, we apply the integrated OPA-based system to display a 2D RGB image of the MIT logo. This work enables visible-spectrum-spanning functionality for emerging applications of integrated OPAs that require visible-light operation, such as displays, 3D printing, atomic quantum systems, underwater optical communications, and optogenetics.
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