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Atomic Layer Deposited Tin Oxide Buffer Layer via Layer-by-layer Growth for Efficient Semitransparent Perovskite
Lingen Yao1,2, Buchao Chen2,3, Zerong Li1,2
1School of Physical Science and Technology, Ningbo University, Ningbo, 315211, P. R. China.
Small (Weinheim an Der Bergstrasse, Germany)
|October 7, 2025
Summary
Atomic layer deposition (ALD) of tin oxide (SnO2) buffer layers is crucial for solar cells. Altering the precursor sequence enhances nucleation, creating dense films and improving power conversion efficiency and stability in semitransparent perovskite solar cells.
Area of Science:
- Materials Science
- Renewable Energy
- Nanotechnology
Background:
- Atomic layer deposition (ALD) of tin oxide (SnO2) is vital for high-performance semitransparent perovskite solar cells (ST-PSCs) and perovskite/silicon tandem solar cells.
- Low substrate reactivity in ALD can lead to island growth, pinholes, and degraded device performance.
Purpose of the Study:
- To develop a simple method for fabricating dense and uniform ALD SnO2 buffer layers.
- To improve the performance and stability of ST-PSCs and tandem solar cells by optimizing the ALD SnO2 layer.
Main Methods:
- Activated substrate nucleation by reversing the ALD precursor introduction sequence (oxygen precursor first).
- Fabricated ST-PSCs and perovskite/silicon tandem solar cells using the optimized ALD SnO2 buffer layer.
- Evaluated device performance (power conversion efficiency) and stability (moisture and thermal).
Main Results:
- The modified ALD process transformed island-like growth to layer-by-layer growth, yielding dense, vertically uniform SnO2 films.
- ST-PSCs showed an increased initial power conversion efficiency (PCE) from 19.37% to 19.99% (3.2% improvement).
- Perovskite/silicon tandem solar cells achieved a PCE of 28.77%.
- ST-PSCs demonstrated enhanced stability, retaining 96.6% and 95.6% of initial PCE after 600h of humidity and thermal stress, respectively.
Conclusions:
- A simple precursor sequence adjustment effectively creates dense ALD SnO2 buffer layers.
- This method significantly improves the performance and stability of ST-PSCs and tandem solar cells.
- The optimized ALD SnO2 layers show potential for various optoelectrical devices.
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