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High-efficiency multilayer grating for enhanced tender x-ray photoelectron spectroscopy
Wai Jue Tan1, Arindam Majhi1, Wadwan Singhapong1,2
1Harwell Science and Innovation Campus, Diamond Light Source Ltd, Didcot, Oxfordshire, OX11 0DE, UK.
Scientific Reports
|October 13, 2025
Summary
Multilayer grating structures enhance tender X-ray spectroscopy. These novel optics improve efficiency and spectral resolution for X-ray Photoelectron Spectroscopy (XPS), enabling better material analysis.
Area of Science:
- Materials Science
- Surface Science
- Spectroscopy
Background:
- X-ray Photoelectron Spectroscopy (XPS) is crucial for material analysis.
- Tender X-ray applications are limited by optics efficiency.
- Multilayer (ML) gratings offer higher efficiency than single-layer coatings.
Purpose of the Study:
- Develop ML laminar gratings for tender X-ray range.
- Optimize gratings for high efficiency and stability under X-ray exposure.
- Enhance XPS performance in the tender X-ray region.
Main Methods:
- Fabrication of ML laminar gratings.
- Characterization using X-ray reflectivity (XRR), XPS, and NEXAFS.
- Validation via beamline flux transmission and XPS measurements.
Main Results:
- ML gratings showed ~22x higher flux and XPS intensity.
- Improved signal-to-noise ratio achieved.
- Enhanced spectral resolution maintained intensity across varying conditions.
- Nitrogen incorporation further boosted flux transmission.
Conclusions:
- Developed ML gratings significantly advance tender X-ray XPS.
- These gratings offer superior performance over traditional designs.
- Optimized ML gratings enable more sensitive and detailed material surface analysis.
