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Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
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Optimizing Gas Sensing Performance of Molybdenum Oxide through Oxygen Vacancy Modulation: A Critical Review

Jiaying Jia1, Aiwu Wang1, Xingying Li1

  • 1Shenzhen Key Laboratory of Ultraintense Laser and Advanced Material Technology, Center for Advanced Material Diagnostic Technology, and College of Engineering Physics, Shenzhen Technology University, Shenzhen, 518118, China.

Chemical Record (New York, N.Y.)
|October 15, 2025
PubMed
Summary

Oxygen vacancies significantly boost molybdenum oxide (MoO3) gas sensing performance by altering electronic structure and surface chemistry. Optimizing these defects enhances sensitivity and selectivity for various target gases.

Keywords:
MoO3 gas sensorsmechanismsoxygen vacanciesresponseselectivity

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