Sputter-Deposited Superconducting Thin Films for Use in SRF Cavities

Particle accelerators are powerful tools in fundamental research, medicine, and industry that provide high-energy beams that can be used to study matter and to enable advanced applications. The state-of-the-art particle accelerators are fundamentally constructed from superconducting radio-frequency (SRF) cavities, which act as resonant structures for the acceleration of charged particles. The performance of such cavities is governed by inherent superconducting material properties such as the transition temperature, critical fields, penetration depth, and other related parameters and material quality. For the last few decades, bulk niobium has been the preferred material for SRF cavities, enabling accelerating gradients on the order of ~50 MV/m; however, its intrinsic limitations, high cost, and complicated manufacturing have motivated the search for alternative strategies. Among these, sputter-deposited superconducting thin films offer a promising route to address these challenges by reducing costs, improving thermal stability, and providing access to numerous high-T_c superconductors. This review focuses on progress in sputtered superconducting materials for SRF applications, in particular Nb, NbN, NbTiN, Nb₃Sn, Nb₃Al, V₃Si, Mo-Re, and MgB₂. We review how deposition process parameters such as deposition pressure, substrate temperature, substrate bias, duty cycle, and reactive gas flow influence film microstructure, stoichiometry, and superconducting properties, and link these to RF performance. High-energy deposition techniques, such as HiPIMS, have enabled the deposition of dense Nb and nitride films with high transition temperatures and low surface resistance. In contrast, sputtering of Nb₃Sn offers tunable stoichiometry when compared to vapour diffusion. Relatively new material systems, such as Nb₃Al, V₃Si, Mo-Re, and MgB₂, are just a few of the possibilities offered, but challenges with impurity control, interface engineering, and cavity-scale uniformity will remain. We believe that future progress will depend upon energetic sputtering, multilayer architectures, and systematic demonstrations at the cavity scale.