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Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
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Experimental Characterization of a Silicon Nitride Asymmetric Loop-Terminated Mach-Zehnder Interferometer with a
Muhammad A Butt1, Mateusz Słowikowski2, Dagmara Drecka2
1Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland.
Nanomaterials (Basel, Switzerland)
|October 15, 2025
Summary
We developed a novel silicon nitride interferometer for precise refractive index sensing. This enhanced photonic sensor offers improved sensitivity and stability for lab-on-chip applications.
Area of Science:
- Photonics and Materials Science
- Integrated Optics
- Nanophotonics
Background:
- Mach-Zehnder interferometers (MZIs) are widely used for sensing applications.
- Enhancing MZI sensitivity and stability is crucial for advanced lab-on-chip devices.
- Silicon nitride (SiN) offers excellent optical properties and CMOS compatibility for integrated photonics.
Purpose of the Study:
- To design, fabricate, and characterize an asymmetric loop-terminated Mach-Zehnder interferometer (a-LT-MZI) on a SiN platform.
- To enhance light-matter interaction and sensor performance using subwavelength grating (SWG) waveguides.
- To evaluate the sensor's sensitivity and stability for refractive index (RI) sensing.
Main Methods:
- Fabrication of a-LT-MZI devices on a silicon nitride platform.
- Integration of subwavelength grating (SWG) waveguides in the sensing arm.
- Experimental characterization of interference fringes and wavelength shifts in response to RI changes.
- Comparative analysis with existing MZI-based sensors.
Main Results:
- Fabricated a-LT-MZI devices demonstrated stable interference fringes and linear responses to RI variations.
- Standard a-LT-MZI structures achieved sensitivities of 288.75–301.25 nm/RIU.
- SWG-enhanced devices exhibited significantly higher sensitivities, ranging from 496–518 nm/RIU.
- The proposed sensor design showed competitive performance compared to previous MZI-based sensors.
Conclusions:
- The a-LT-MZI architecture on SiN, enhanced with SWG waveguides, provides a highly sensitive and stable platform for RI sensing.
- The device leverages SiN's scalability and CMOS compatibility for next-generation lab-on-chip photonic sensors.
- This technology holds significant potential for biochemical diagnostics, medical testing, and environmental monitoring.

