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Updated: Jan 15, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Double-layer silicon-based optical phased array transceiver based on cascaded phase control.

Yaoyuan Zhang1, Rui Wang2, Ming Wei1

  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, China.

Scientific Reports
|October 15, 2025
PubMed
Summary
This summary is machine-generated.

We developed a novel dual-layer optical phased array (OPA) for advanced light detection and ranging (LiDAR) systems. This 3D design overcomes limitations in traditional planar architectures, enabling more efficient and compact beam steering for AI-driven optical devices.

Keywords:
Beam controlMicro-nano structure designOptical phased arraySilicon photonics integrationWaveguide components

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Area of Science:

  • Photonics and Optical Engineering
  • Artificial Intelligence (AI) Hardware
  • Integrated Optics

Background:

  • Silicon-based optical phased arrays (OPAs) are crucial for AI-assisted LiDAR and intelligent optical devices.
  • Traditional 2D OPAs face limitations in element spacing and scanning angle due to complex waveguide routing and planar architecture.
  • High-density integration demands necessitate exploring 3D designs to overcome current limitations.

Purpose of the Study:

  • To introduce a novel dual-layer, hierarchical optical phased array design.
  • To enhance spatial efficiency and overcome integration challenges in 2D OPAs.
  • To enable wider angle 2D beam steering for advanced LiDAR applications.

Main Methods:

  • Proposed a dual-layer architecture with cascaded phase shifters.
  • Strategically separated waveguide routing (lower layer) and the antenna array (upper layer).
  • Leveraged advanced micro/nanofabrication for bilayer structure realization.

Main Results:

  • Achieved unprecedented spatial efficiency with an ultra-compact 5 μm antenna pitch.
  • Demonstrated far-field beam steering capabilities over ±18.1° scanning angles.
  • Confirmed feasibility with current micro/nanofabrication process nodes.

Conclusions:

  • The dual-layer hierarchical OPA design offers a viable path toward ultra-high integration in optical devices.
  • This approach enables highly efficient, compact, and wide-range 2D beam control.
  • Presents a new research direction for next-generation LiDAR and AI-driven optical systems.