Photolithographic fabrication of high-resolution Micro-QLEDs towards color-conversion microdisplay
Yuyu Jing1, Mingyu Yao1, Min Yang1
1MIIT Key Laboratory for Low-Dimensional Quantum Structure and Devices, School of Materials Science and Engineering, Beijing Institute of Technology, Beijing, 100081, China.
Light, Science & Applications
|October 19, 2025
Summary
We developed a photolithographic method for fabricating high-resolution, full-color micro-quantum dot light-emitting diode (QLED) panels for metaverse applications. This cost-effective technique combines blue Micro-QLEDs with quantum dot color converters for advanced microdisplays.
Area of Science:
- Materials Science
- Optoelectronics
- Nanotechnology
Background:
- Microdisplay panels are essential for immersive metaverse experiences.
- Achieving high resolution and full color in microdisplays remains a challenge.
- Quantum dot light-emitting diodes (QLEDs) offer potential for advanced display technologies.
Purpose of the Study:
- To report the photolithographic fabrication of color-converted Micro-QLED panels.
- To achieve high-resolution and full-color microdisplays for metaverse technology.
- To present a cost-effective fabrication method for microdisplay panels.
Main Methods:
- Photolithographic fabrication of pre-patterned templates.
- Integration of blue Micro-QLED electroluminescence devices.
- Application of red-green quantum dot color converters (QDCCs).
Main Results:
- Achieved ultra-high pixel resolution up to 6350 pixels per inch for blue Micro-QLEDs.
- Demonstrated peak external quantum efficiency (EQE) of 7.8% for blue and 18% for red devices.
- Fabricated a prototype full-color Micro-QLED panel with 1184 pixels per inch resolution, 4.8% peak EQE, and 10,065 cd/m² brightness.
Conclusions:
- Photolithographic fabrication of color-converted Micro-QLEDs is a viable method for high-performance microdisplays.
- This approach enables cost-effective production of advanced microdisplay panels.
- The developed technology is suitable for metaverse applications requiring high resolution and full color.
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