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Phase-probability shaping for speckle-free holographic lithography
Dong Zhao1, Weiwei Fu1,2,3, Jun He1
1Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei, Anhui, China.
Nature Communications
|October 24, 2025
Summary
Researchers have eliminated holographic speckles by shaping encoded phase probability, enabling clearer computer-generated holograms (CGHs). This breakthrough allows for high-homogeneity, edge-sharp holographic images crucial for advanced optical display and lithography applications.
Area of Science:
- Optics and Photonics
- Computational Imaging
Background:
- Optical holography, despite advancements, suffers from persistent speckles due to complex-field superposition.
- Existing speckle reduction methods (spatial, temporal, spectral averaging) fail to achieve high homogeneity and edge sharpness required for applications like optical display and lithography.
Purpose of the Study:
- To develop a method for removing holographic speckles.
- To enable the reconstruction of high-quality, irregular holographic images with improved features for advanced applications.
Main Methods:
- Investigated speckle reduction by narrowing the probability density distribution of encoded phase to homogenize optical superposition.
- Developed an Adam-gradient-descent probability-shaping (APS) method to control intensity fluctuations in computer-generated holograms (CGHs).
Main Results:
- Achieved ultralow speckle contrast (C = 0.08) in reconstructed holographic images.
- Demonstrated record-high edge sharpness (~1000 mm⁻¹).
- Enabled experimental fabrication of arbitrary-shape, edge-sharp patterns with a spatial resolution of 0.54λ/NA using lensless lithography.
Conclusions:
- The developed APS method effectively removes holographic speckles by homogenizing optical superposition.
- This technique revitalizes computer-generated holography for lensless lithography, enabling high-resolution fabrication of complex patterns.
