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Dual-mode CMUT structure sensor for high hydrostatic pressure measurements: conventional and collapse modes
Zhaodong Li1, Wendong Zhang1, Mehmet Yilmaz2
1State key Laboratory of Extreme Environment Optoelectronic Dynamic Measurement Technology and Instrument, North University of China, Taiyuan, China.
Microsystems & Nanoengineering
|October 28, 2025
Summary
This study introduces Capacitive Micromachined Ultrasonic Transducers (CMUT) for passive pressure sensing in high hydrostatic environments. The novel CMUT pressure sensor shows high consistency, reliability, and long-term stability for accurate measurements.
Area of Science:
- MEMS technology
- Sensor technology
- Materials science
Background:
- Capacitive Micromachined Ultrasonic Transducers (CMUT) are primarily used for active sensing in medical imaging, non-destructive testing, and chemical sensing.
- The inherent capacitive nature of CMUTs suggests potential for passive sensing applications.
- High hydrostatic pressure environments present unique challenges for traditional pressure sensors.
Purpose of the Study:
- To investigate the application of the CMUT structure for passive pressure sensing in high hydrostatic pressure environments.
- To evaluate the consistency, reliability, and long-term stability of CMUT-based pressure sensors under extreme pressure conditions.
- To establish the feasibility of using CMUTs for accurate pressure measurements exceeding 20 MPa.
Main Methods:
- Fabrication of CMUT pressure sensors using Micro-Electro-Mechanical Systems (MEMS) technology.
- Characterization of sensor consistency through static capacitance deviation measurements.
- Experimental testing of sensor performance in high hydrostatic pressure environments (up to 20 MPa).
- Assessment of long-term stability and repeatability by exposing the sensor to a dynamic pressure chamber for three months.
Main Results:
- The fabricated CMUT pressure sensors exhibited high consistency, with a maximum static capacitance deviation of only 1%.
- The sensor reliably measured pressures exceeding 20 MPa with real-time responsiveness.
- After three months in a dynamic pressure chamber, the sensor showed excellent repeatability with a maximum deviation of 0.65%.
Conclusions:
- The CMUT structure is suitable for passive pressure sensing in high hydrostatic pressure environments.
- CMUT-based pressure sensors demonstrate high reliability, consistency, and outstanding long-term stability.
- This research provides a foundation for utilizing CMUTs in demanding high hydrostatic pressure sensing applications.
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