Robust and Compact Electrostatic Comb Drive Arrays for High-Performance Monolithic Silicon Photonics

Actuating monolithic photonic components (particularly slab waveguides) requires higher force due to their inherent stiffness. However, two primary constraints must be addressed: actuator footprint and fabrication limits. Increasing the number of fingers to provide the required force is not a viable solution due to space constraints, and we must also adhere to the process design kits of standard fabrications and respect their design limits. Therefore, it is crucial to increase the actuator force output without significantly enlarging the actuator footprint while maintaining the necessary travel range. In order to achieve this, we utilize arrays of electrostatic comb drives, with each repeating cell geometry optimized to produce the highest force per actuator footprint. Our optimization strategy focuses on finger geometry, the arrangement of fingers and arms design in the comb structure, including the number of fingers per arm and arm length, ensuring that each repeating cell delivers maximum force per unit area or force intensity. Co-optimizing a repeatable, footprint-optimized comb-array unit cell (arm length, arm width, finger pitch, finger count) and validating it against an asymmetric slab waveguide load, we reach a maximum pre-pull-in force intensity of about 342 N m^-2 at 70 V with about 6 µm travel, confirmed by analytical modeling, numerical simulation, and measurement. Despite fabrication challenges such as over-etching and variations in electrode dimensions, detailed SEM analyses and correction functions ensure that the theoretical models closely match the experimental data, confirming the robustness and accuracy of the design. These optimized actuators, capable of achieving substantial force output without sacrificing travel range or mechanical stability, are particularly effective for applications in optical beam steering for in-plane silicon-photonics and related optical microsystems applications.