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Integrated Control Strategies for a Precision Long-Travel Stage: Applications in Micro-Lens Fabrication.

Fu-Cheng Wang¹, Yan-Teng Chang¹, Ming-Hsiang Chang¹

¹Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan.

|October 29, 2025

Summary

This summary is machine-generated.

This study presents advanced control strategies for precision long-travel stages, integrating motor and piezoelectric transducer (PZT) systems. These innovations enable nm-level precision for micro-fabrication tasks.

Keywords:

control switching feedforward gain scheduling micro-lens model estimation precision stage robust control two-photon polymerization

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Area of Science:

Precision Engineering
Control Systems
Nanotechnology

Background:

Achieving high precision over long travel distances is crucial for advanced manufacturing.
Existing systems often struggle to balance precision with range.
Integrating different actuation technologies presents control challenges.

Purpose of the Study:

To develop and validate novel control strategies for a hybrid long-travel precision stage.
To enhance both the short-range nm-level precision and long-range mm-scale displacement.
To demonstrate the stage's utility in micro-fabrication applications.

Main Methods:

Developed control switching and model estimation for the piezoelectric transducer (PZT) stage.
Implemented gain-scheduling and feedforward control for the motor stage.
Integrated both stages and performed simulations and experimental validation.

Main Results:

Achieved nm-level precision within 100 μm using the PZT stage with improved model accuracy.
Enabled 100 mm maximum displacement with 0.1 μm resolution using the motor stage.
Demonstrated successful integration for nm-precision over long travels.

Conclusions:

The proposed control strategies effectively enhance precision stage performance.
The integrated system offers superior capabilities for micro-fabrication, such as micro-lens production.
Validated control mechanisms significantly improve accuracy and range for precision positioning.