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Published on: August 15, 2014
A Novel Asymmetric High-Performance MEMS Pendulum Capacitive Accelerometer
Guangxian Dong1, Jia Jiang2, Weixin Wu1
1Chongqing Academy of Metrology and Quality Inspection, Chongqing 401121, China.
Abstract:
In this study, we propose a novel asymmetric high-performance MEMS pendulum accelerometer comprising a sensitive structure and an interface circuit. The sensitive structure, designed with asymmetric mass blocks, significantly improves both sensitivity and structural stability. The sensor is fabricated using a double-side polished (100) N-type silicon wafer and its structure is ultimately realized through ICP (Inductively Coupled Plasma) etching. We also develop and fabricate the corresponding interface circuit. The accelerometer is evaluated through a static field roll-over test, demonstrating excellent performance with a sensitivity of 1.247 V/g and a nonlinearity of 0.8% within the measurement range of -2 g to 2 g.
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