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Related Experiment Video

Updated: Jan 13, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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A Novel Asymmetric High-Performance MEMS Pendulum Capacitive Accelerometer.

Guangxian Dong1, Jia Jiang2, Weixin Wu1

  • 1Chongqing Academy of Metrology and Quality Inspection, Chongqing 401121, China.

Micromachines
|October 29, 2025
PubMed
Summary

This study introduces a novel MEMS pendulum accelerometer with asymmetric mass blocks for enhanced sensitivity and stability. Fabricated using silicon and ICP etching, it achieves 1.247 V/g sensitivity and 0.8% nonlinearity.

Keywords:
MEMS (microelectromechanical system)asymmetriccapacitive accelerometerinterface circuitspendulum

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Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Sensor Technology
  • Inertial Measurement Units

Background:

  • Traditional accelerometers face limitations in sensitivity and stability.
  • Asymmetric designs in MEMS devices can offer improved performance characteristics.
  • The integration of sensitive structures with interface circuits is crucial for practical accelerometer applications.

Purpose of the Study:

  • To propose and develop a novel asymmetric Microelectromechanical Systems (MEMS) pendulum accelerometer.
  • To enhance both the sensitivity and structural stability of the MEMS accelerometer through an asymmetric mass block design.
  • To fabricate and evaluate the performance of the developed MEMS accelerometer and its interface circuit.

Main Methods:

  • Design and fabrication of a MEMS sensitive structure utilizing asymmetric mass blocks.
  • Utilization of a double-side polished (100) N-type silicon wafer for fabrication.
  • Application of Inductively Coupled Plasma (ICP) etching for realizing the sensor structure.
  • Development and fabrication of a complementary interface circuit.
  • Performance evaluation using a static field roll-over test.

Main Results:

  • The asymmetric mass block design significantly improved sensitivity and structural stability.
  • Successful fabrication of the MEMS accelerometer and its interface circuit.
  • Achieved a high sensitivity of 1.247 V/g.
  • Demonstrated low nonlinearity of 0.8% within the -2 g to 2 g measurement range.

Conclusions:

  • The novel asymmetric MEMS pendulum accelerometer exhibits excellent performance characteristics.
  • The proposed design effectively enhances sensitivity and structural stability.
  • The developed sensor is suitable for applications requiring precise acceleration measurement.