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Fabricating Nanogaps by Nanoskiving
Published on: May 13, 2013
Fengjun Chen1, Meiling Du1,2, Ming Feng2
1School of Robot Engineering, Wenzhou University of Technology, Wenzhou 325000, China.
Precision diamond wheel dicing enhances semiconductor and aerospace manufacturing. This review details dicing technologies, blade preparation, and process controls for improved machining of hard-and-brittle materials.
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