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Defect Engineering in Large-Scale CVD-Grown Hexagonal Boron Nitride: Formation, Spectroscopy, and Spin Relaxation
Ivan V Vlassiouk1, Yueh-Chun Wu2, Alexander Puretzky1
1Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.
Small (Weinheim an Der Bergstrasse, Germany)
|October 31, 2025
Summary
Generating specific defects in hexagonal boron nitride (hBN) is key for quantum devices. This study shows defect type depends on particle bombardment, offering a path for scalable quantum photonic device fabrication.
Area of Science:
- Quantum photonics
- Materials science
- Solid-state physics
Background:
- Optically active defects in hexagonal boron nitride (hBN) are crucial for quantum photonic devices.
- Scalable, on-demand generation of desired defect types in hBN films remains a significant challenge.
Purpose of the Study:
- To investigate the on-demand generation of negative boron vacancy defects (VB-) in large-area chemical vapor deposition (CVD)-grown hBN.
- To understand the influence of bombarding particles and irradiation conditions on defect formation.
- To differentiate between various optically active and dark paramagnetic defect types.
Main Methods:
- Irradiation of suspended and substrate-supported hBN films with ions, neutrons, and electrons.
- Spectroscopic analysis and optically detected magnetic resonance (ODMR) measurements.
- Correlation of defect properties with optical emission wavelengths and spin parameters.
Main Results:
- Defect formation in suspended hBN is highly dependent on the type of bombarding particles and irradiation parameters.
- Substrate-supported hBN defect formation is complex, influenced by substrate-generated secondary particles and hBN thickness.
- Boron vacancies (VB-) emitting at 800 nm were distinguished from anti-site nitrogen vacancy defects (NBVN) emitting at 650 nm.
- "Dark" paramagnetic defects were identified, impacting spin-lattice relaxation time (T1) and zero-field splitting.
Conclusions:
- Precise engineering of defect formation in large-scale CVD-grown hBN is achievable.
- The findings pave the way for the scalable fabrication of quantum photonic devices using tailored defects in hBN.

