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Independent and parallel 3D scanning method based on holographically shifted femtosecond multi-foci
Optics Letters
|November 4, 2025
Summary
This study introduces a flexible femtosecond laser multi-foci technique for advanced micro/nano additive manufacturing. It enables the independent fabrication of diverse micro-structures, enhancing manufacturing versatility and consistency.
Area of Science:
- Micro/nano additive manufacturing
- Femtosecond laser processing
- Optical engineering
Background:
- Spatial light modulation and femtosecond laser two-photon lithography are key to micro/nano additive manufacturing.
- Holographical parallel multi-foci improve processing efficiency but are limited for consistent periodic structures.
Purpose of the Study:
- To develop a femtosecond multi-foci generation method for independent fabrication of micro-structures with distinct features.
- To create microlens arrays with varying radii using pre-designed holograms.
- To overcome limitations of previous multi-foci processing by enhancing flexibility and consistency.
Main Methods:
- Generating femtosecond multi-foci using pre-designed holograms.
- Combining lens phase and grayscale modulation for precise control.
- Utilizing a scanning strategy without moving equipment.
Main Results:
- Independent fabrication of micro-structures with distinct features.
- Creation of microlens arrays with varying radii.
- Simultaneous achievement of high resolution and throughput.
Conclusions:
- The developed technique enhances micro/nano additive manufacturing versatility and consistency.
- It overcomes limitations of previous multi-foci processing.
- This method significantly improves the flexibility of two-photon lithography.
