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An electrostatic aberration corrector for improved Low-Voltage SEM imaging.

Diederik Jan Maas1

  • 1Philips Research, Prof. Holstlaan 4, 5656 AA Eindhoven, The Netherlands.

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|November 8, 2025
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Summary

A new electrostatic aberration corrector (AC) significantly improves low-voltage scanning electron microscope (LV-SEM) image quality. This easy-to-use AC enhances resolution and contrast, offering superior performance for material and life science imaging.

Keywords:
Aberration correctionElectrostatic multipole lensesGeometrical opticsHigh resolution imagingLow-Voltage SEMScanning electron microscopy

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Area of Science:

  • Electron Microscopy
  • Materials Science
  • Instrument Development

Background:

  • Scanning electron microscopes (SEMs) face limitations in image quality due to aberrations.
  • Low-voltage SEM (LV-SEM) offers surface sensitivity but is prone to aberrations.
  • Existing aberration correctors can be complex to adjust, especially with changing beam energies.

Purpose of the Study:

  • To develop and integrate an electrostatic aberration corrector (AC) for LV-SEM.
  • To improve image resolution and contrast in LV-SEM.
  • To demonstrate the ease of use and performance of the electrostatic AC.

Main Methods:

  • Designed and integrated a quadrupole-octupole electrostatic aberration corrector into a commercial SEM.
  • Quantitatively adjusted chromatic aberration and qualitatively adjusted spherical aberration.
  • Tested the aberration-corrected SEM (AC-SEM) on material and life science samples at 500 and 1000 eV beam energies.

Main Results:

  • Achieved a nearly threefold improvement in LV-SEM image resolution and contrast.
  • Demonstrated an edge resolution of 3.0 nm at 1000 eV, close to the theoretical limit.
  • Showcased swift adjustment of the electrostatic corrector by scaling electrode voltages, unlike electromagnetic counterparts.

Conclusions:

  • The developed electrostatic aberration corrector is effective in enhancing LV-SEM performance.
  • The AC-SEM provides high-quality images with improved resolution and contrast.
  • The electrostatic AC offers a user-friendly and efficient solution for advanced electron microscopy applications.