Related Experiment Video
Updated: Jan 11, 2026

07:51
Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
16.8K
High-Q aluminum oxide microring resonators operating at 460 nm
Optics Express
|November 11, 2025
Summary
Aluminum oxide microring resonators achieve a record quality factor for visible integrated photonics. These devices enable thermal tuning, paving the way for advanced sensing and quantum applications.
Area of Science:
- Integrated photonics
- Materials science
- Optoelectronics
Background:
- Aluminum oxide (Al2O3) is a promising material for integrated photonics due to its low optical losses and high refractive index.
- Existing platforms often face limitations in the visible spectrum, hindering applications in sensing and quantum technologies.
Purpose of the Study:
- To comprehensively study 460 nm microring resonators on an aluminum oxide platform.
- To demonstrate high-performance integrated photonic devices in the visible range.
- To explore thermal tuning capabilities for resonance control.
Main Methods:
- Fabrication of microring resonators using a commercial multi-project wafer service.
- Characterization of optical properties, including intrinsic quality factor.
- Implementation and testing of integrated metallic heaters for thermal tuning.
Main Results:
- Achieved a record intrinsic quality factor of 3.6 × 10^5 on the aluminum oxide platform.
- Demonstrated thermal tuning efficiency of 1.63 pm/mW over a 500 pm range.
- Successfully integrated photonic functionalities in the visible spectrum.
Conclusions:
- Aluminum oxide is a viable and high-performance platform for visible integrated photonics.
- The demonstrated devices show potential for applications in sensing, spectroscopy, and quantum photonics.
- Further development can leverage this platform for advanced photonic integrated circuits.

