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Related Experiment Video

Updated: Jan 11, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
07:51

Fabrication of Silica Ultra High Quality Factor Microresonators

Published on: July 2, 2012

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Few-mode silicon nitride elliptic microdisk resonators with a high-quality factor.

Yuke Song, Haonan Li, Yang Yang

    Optics Express
    |November 11, 2025
    PubMed
    Summary

    Silicon nitride elliptic microdisk resonators (MDRs) achieve high Q factors by suppressing unwanted modes. This design uses waveguide bending loss to enable few-mode operation for integrated photonic systems.

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    Area of Science:

    • Photonics and Optical Engineering
    • Integrated Optics
    • Micro-resonator Technology

    Background:

    • Conventional microring resonators (MRRs) and microdisk resonators (MDRs) often suffer from multi-mode issues when scaled for high quality factors (Q factors).
    • Multi-mode operation complicates device functionality in integrated photonic circuits.

    Purpose of the Study:

    • To design and experimentally verify a silicon nitride elliptic microdisk resonator (MDR) that suppresses higher-order modes while maintaining a high Q factor.
    • To achieve a few-mode MDR transmission spectrum for enhanced device performance.

    Main Methods:

    • Designed an elliptic microdisk resonator coupled with an optimized bent waveguide.
    • Utilized waveguide bending loss to disrupt coupling conditions for higher-order modes.

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  • Experimentally characterized the resonator's spectral properties, including Q factor, bandwidth, extinction ratio (ER), and mode suppression ratio (SR).

    • Main Results:

    • Successfully fabricated an elliptic MDR exhibiting only two radial modes (TE1 and TE2).
    • Achieved a high Q factor of 1.57 × 10^6 for the TE1 mode.
    • Demonstrated a 3-dB bandwidth of 123 MHz, an extinction ratio (ER) of 14.8 dB, and a suppression ratio (SR) of 12 dB between TE1 and TE2 modes.

    Conclusions:

    • The proposed few-mode elliptic MDR effectively suppresses higher-order modes while achieving a high Q factor.
    • This resonator design shows significant potential for applications in integrated microwave photonic systems.
    • The strategy of using waveguide bending loss offers a novel approach for mode control in micro-resonators.