Related Experiment Video
Updated: Jan 11, 2026
08:21
Laser-induced Forward Transfer for Flip-chip Packaging of Single Dies
Published on: March 20, 2015
12.9K
Design, fabrication, and nanosecond-pulse characterization of high-power-density multi-junction VCSEL arrays
Optics Express
|November 11, 2025
Summary
Researchers developed a high-power 6-junction vertical-cavity surface-emitting laser (VCSEL) array. This pulsed VCSEL array achieves high peak power and low divergence, offering insights for advanced sensing applications.
Area of Science:
- Optoelectronics
- Semiconductor Devices
- Laser Technology
Background:
- Vertical-cavity surface-emitting lasers (VCSELs) are crucial for various applications.
- High-power and high-density VCSEL arrays are in demand for advanced technologies like LiDAR.
- Challenges exist in managing thermal effects and optimizing performance in pulsed VCSEL operation.
Purpose of the Study:
- To design, fabricate, and characterize a high-power-density 6-junction VCSEL array for nanosecond-pulse operation.
- To investigate methods for suppressing high-order modes and reducing divergence angles.
- To analyze the impact of duty cycle on performance and understand thermal effects.
Main Methods:
- Optimization of epitaxial structure, including extended cavity and reduced oxide layers.
- Fabrication of a 6-junction VCSEL array.
- Detailed characterization of output power, spectral properties, and far-field performance under pulsed conditions.
- Investigation of duty cycle effects on device performance.
Main Results:
- Achieved a high peak power of 136 W and power density exceeding 2000 W/mm2.
- Successfully suppressed high-order modes, resulting in a low divergence angle (18.5°-22.8°).
- Identified non-negligible thermal effects influenced by the duty cycle, even in short-pulse operation.
Conclusions:
- The developed 6-junction VCSEL array demonstrates significant potential for high-power applications.
- Epitaxial structure optimization is key to achieving low divergence and high performance.
- Understanding and managing thermal effects is critical for designing effective driving strategies and thermal management in pulsed VCSEL arrays for LiDAR and sensing.
