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    This summary is machine-generated.

    This study introduces a new optical scatterometry method with relaxed model constraints, improving nanostructure reconstruction accuracy. The inverse design-inspired optimization for optical scatterometry (IDO-OS) enhances structural analysis efficiency.

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    Area of Science:

    • Nanotechnology
    • Optical Metrology
    • Computational Physics

    Background:

    • Optical scatterometry is crucial for nanostructure characterization.
    • Current methods rely on strict models that may oversimplify details.
    • Solving optical inverse problems (OIPs) often requires extensive prior information.

    Purpose of the Study:

    • To develop a novel optical scatterometry strategy with relaxed model constraints.
    • To enhance the accuracy and efficiency of nanostructure property extraction.
    • To address the limitations of oversimplified structural models in OIPs.

    Main Methods:

    • Integration of automatic differentiation for inverse design-inspired optimization (IDO-OS).
    • Implementation of relaxed model constraints to expand the solution space.
    • Combination with hybrid metrology and thin plate splines for experimental validation.

    Main Results:

    • Achieved an optimized spectral goodness-of-fit of 0.99 in numerical simulations.
    • Demonstrated high consistency between reconstructed and target nanostructures.
    • Experimental results showed excellent agreement with transmission electron microscopy measurements.

    Conclusions:

    • The proposed IDO-OS strategy offers a new approach to solving OIPs in optical scatterometry.
    • Relaxed model constraints lead to enhanced structural reconstruction capabilities.
    • The method maintains computational efficiency while improving accuracy.