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Swept-source optical coherence tomography based on a backward terahertz-wave parametric oscillator achieving depth
Optics Express
|November 11, 2025
Summary
This study introduces a novel terahertz-wave swept-source optical coherence tomography (THz-SS-OCT) system using a backward THz-wave parametric oscillator (BW-TPO). It achieves unprecedented depth resolution for semiconductor analysis.
Area of Science:
- Terahertz (THz) Photonics
- Optical Coherence Tomography
- Nonlinear Optics
Background:
- Terahertz (THz) wave generation and applications are rapidly advancing.
- Optical Coherence Tomography (OCT) is a powerful imaging technique.
- Existing THz-OCT systems face limitations in tuning range and resolution.
Purpose of the Study:
- To develop a wide and continuously frequency tunable THz wave source.
- To apply this source to a THz-wave swept-source OCT (THz-SS-OCT) system.
- To enhance the depth resolution of THz-SS-OCT for material analysis.
Main Methods:
- Utilized quasi-collinear phase-matching (QCPM) control in a backward THz-wave parametric oscillator (BW-TPO).
- Integrated the BW-TPO source into a THz-SS-OCT system.
- Employed an annihilating filter method for super-resolution depth enhancement.
Main Results:
- Achieved a continuously tunable THz wave source with a narrow linewidth (<6 GHz).
- Demonstrated THz-SS-OCT system with a tuning range of 0.26-0.80 THz.
- Obtained a record depth resolution of 0.013 mm, surpassing conventional THz-SS-OCT.
Conclusions:
- The developed BW-TPO based THz-SS-OCT system offers superior performance.
- This technology enables precise semiconductor thickness measurement and depth-profiling.
- Represents the first demonstration of BW-TPO applied to THz-SS-OCT.

